Thin-Film Deposition Rate Monitoring in Real Time
Around the world, research labs and industrial manufacturing where dielectric and semiconductor films and coatings are deposited with high precision all benefit from kSA RateRat Pro, an optical metrology tool for thin-film characterization in precision optical coatings, solar cell, LED and semiconductor manufacturing. It measures thin-film deposition rate and thin-film thickness in real-time.
The tool’s algorithm continuously updates the optical constants of the film. It is compatible with any type of deposition method. All of its components are outside the vacuum chamber, as a compact bolt-on accessory.
It can suit the needs of a wide variety of applications and materials, including different laser wavelengths, and allow software integration with all major process control platforms.